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Graph of Semiconductor photolithography
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Large-scale integration
Semiconductor photolithography
Planar process
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Large-scale integration
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Semiconductor photolithography
depends on
Large-scale integration relies on repeated photolithography, doping, oxidation, and interconnection steps to reliably shrink and reproduce device structures.
Semiconductor photolithography
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Planar process
enables
Photolithography and masks transfer patterns for surface openings onto wafers, enabling the planar process to repeatedly form protected device regions.